Influence of Cylindrical Electrode Configuration on Plasma Parameters in a Sputtering System

In the present work, effect of cylindrical configurations sputtering device electrodes on plasma parameters (Debye length, electron temperature, density, frequency) is studied. Also, argon gas pressure discharge properties examined with pressures (0.08, 0.2, 0.4 and 0.6) Torr. The are diagnosed by optical emission spectrometry. spectroscopic method adopted for examining atomic spectra emission. temperature determined Boltzmann method. While, Stark-widening was employed calculating number density. voltage against current curves sprayer discharges shows to be nearly constant slight increase in current. An causes cathode cascades compress negative glow become thinner more luminous. Plasma such as Debye length decrease increasing pressure, while density frequency increase.